Electrically-pumped 850-nm micromirror VECSELs

機譯：電泵浦850 nm微鏡VECSEL

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Vertical-external-cavity surface-emitting lasers (VECSELs) combine high optical power and good beam quality in a device with surface-normal output. In this paper, we describe the design and operating characteristics of an electrically-pumped VECSEL that employs a wafer-scale fabrication process and operates at 850 nm. A curved micromirror output coupler is heterogeneously integrated with AlGaAs-based semiconductor material to form a compact and robust device. The structure relies on flip-chip bonding the processed epitaxial material to an aluminum nitride mount; this heatsink both dissipates thermal energy and permits high frequency modulation using coplanar traces that lead to the VECSEL mesa. Backside emission is employed, and laser operation at 850 nm is made possible by removing the entire GaAs substrate through selective wet etching. While substrate removal eliminates absorptive losses, it simultaneously compromises laser performance by increasing series resistance and degrading the spatial uniformity of current injection. Several aspects of the VECSEL design help to mitigate these issues, including the use of a novel current-spreading n-type distributed Bragg reflector (DBR). Additionally, VECSEL performance is improved through the use of a p-type DBR that is modified for low thermal resistance.

機譯：垂直外腔表面發射激光器（VECSEL）在具有表面法向輸出的設備中結合了高光功率和良好的光束質量。在本文中，我們描述了采用晶片級制造工藝并在850 nm下工作的電泵VECSEL的設計和工作特性。彎曲的微鏡輸出耦合器與基于AlGaAs的半導體材料異質集成，以形成緊湊而堅固的器件。該結構依靠倒裝芯片將加工后的外延材料粘合到氮化鋁底座上。該散熱器既耗散熱能，又允許使用通向VECSEL臺面的共面走線進行高頻調制。使用背面發射，并且通過選擇性的濕蝕刻去除整個GaAs襯底，使得在850nm處的激光操作成為可能。盡管去除襯底消除了吸收損耗，但同時增加了串聯電阻并降低了電流注入的空間均勻性，同時損害了激光性能。 VECSEL設計的幾個方面有助于減輕這些問題，包括使用新穎的電流擴散n型分布式布拉格反射器（DBR）。此外，通過使用為低熱阻而修改的p型DBR，可提高VECSEL性能。

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來源
《Vertical-Cavity Surface-Emitting Lasers IX》|2005年|P.69-74|共6頁
會議地點 San JoseCA(US)
作者
Gordon A. Keeler; Darwin K. Serkl; Kent M. Geib; Gregory M. Peake; Alan Mar;
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作者單位

Sia National Laboratories, Albuquerque, NM 87185;

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會議組織
原文格式 PDF
正文語種 eng
中圖分類 TN24;
關鍵詞
vertical-external-cavity surface-emitting laser; VECSEL; semiconductor laser; surface-emitting laser; electrical pumping; external cavity; micromirror;

機譯：垂直外腔面發射激光器; VECSEL;半導體激光器;面發射激光器;電泵浦;外腔;微鏡;
入庫時間 2022-08-26 13:44:18

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4. Electrically-pumped 850-nm micromirror VECSELs [C] . Gordon A. Keeler, Darwin K. Serkland, Kent M. Geib, Society of Photo-Optical Instrumentation Engineers (SPIE);SPIE Proceedings . 2005

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Electrically-pumped 850-nm micromirror VECSELs

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